Scatter light

3D scatter light detection

The project „development of a scatter light sensor for three dimensional detection of surface structures in nanometre scale“ is sponsored within the sponsorship program „Zentrales Innovationsprogramm Mittelstand (ZIM)“ by the „Bundesministerium für Wirtschaft und Technologie (BMWi)“ for two years.


Bundesministerium für Wirtschaft und Technologie (BMWi)

Duration of sponsorship: two years



The functional surfaces of components in mechanical engineering, automotive engineering and the steel industry often show special textures to ensure desired functions. This is why there is a growing demand in surface metrology to not only measure profiles, but to gain information about the three dimensional topography of technical surfaces. Therefore tactile measurement techniques, like mechanical stylus instruments, are too time-consuming, because numerous parallel single profile measurements have to be executed. Interferometrical or confocal microscopes on the other hand are too sensitive regarding environmental influences, so that they can barely be used in manufacturing. Hence it would be an important and significant step in development for surface metrology to have access to a three dimensional sensor, which fulfils the requirements concerning measurement speed and robustness.



Aim of the project is the development of an optical three-dimensional measuring device, to acquire the scattered light distribution of a technical surface. This would allow a robust and fast detection of surface textures, independently of the chosen measurement direction.



Prof. Dr.-Ing. Jörg Seewig

Dr.-Ing. Gerhard Stelzer



OptoSurf GmbH (Ettlingen)



Brodmann, B.; Seewig, J.; Wendel, M. (2011): Von der Linie zur Fläche, winkelauflösende Streulichtmesstechnik. In: VDI (Hg.): Metrologie in der Mikro- und Nanotechnik 2011. Karlsruhe, 25.-26.10.2011.

Seewig, J.; Wendel, M. (2011): An approach to extract the depth information of surface topography using an angle resolved non coherent light scatter sensor. In: National Physical Laboratory (Hg.): Proceedings of the 13th International Conference on Metrology and Properties of Engineering Surfaces. Met & Props 2011. London, UK, 12-15.04.2011. 1 Band: Queen's Printer and Controller of HMSO, S. 363–368.

Wendel, M. (2011): Streulicht-Messtechnik



We would like to thank the „Bundesministerium für Wirtschaft und Technologie“ for the excellent collaboration and the received support.

Furthermore we would like to thank OptoSurf GmbH for the excellent collaboration.