FEI Quanta 600 FEG
- Acceleration voltage: 200 V to 30 kV
- Magnification range: 7x to 1,000,000x
- High vacuum: 6x10-4 Pa
- Low vacuum: 10 to 130 Pa
- SE and BSE images of microstructure, fracture surfaces, etc.
- EDX detector (energy dispersive X-ray analysis):
- Analysis of chemical elements with element distribution images
- EBSD (Electron Backscatter Diffraction):
- Analysis of grain sizes and grain orientation
- Grain boundary analysis
- Texture analysis
- Phase analysis